3. (7422516) Conductive polishing article for electrochemical mechanical polishing.
Assignee: Applied Materials, Inc.
(Santa Clara,
CA)
(More From this Assignee...)
Inventor: Butterfield; Paul D. (San Jose, CA), Chen; Liang-Yuh (Foster City, CA), Hu; Yonqi (San Jose, CA), Manens; Antoine P. (Palo Alto, CA), Mavliev; Rashid (Campbell, NC), Tsai; Stan D. (Fremont, CA), Liu; Feng Q. (San Jose, CA), Wadensweiler; Ralph (Sunnyvale, CA), Sun; Lizhong (Sunnyvale, CA), Neo; Siew S. (Santa Clara, CA), Duboust; Alain (Sunnyvale, CA)
(More From this Inventor...)
Application Date: October 8, 2007
Publication Date: September 9, 2008