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1. 
Inventor: Stark Lawrence R; Turner Frederick

Assignee: Varian Associates, Inc

Attorney: Cole Stanley Z; Fisher Gerald M; Sgarbossa Peter J

Title: Modular wafer transport and processing system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4917556    Publication date : 1990-04-17
Referenced by: 223    Reference cited: 17   
    
2. 
Inventor: Hertel Richard J; Delforge Adrian C; Mears Eric L; MacIntosh Edward D; Jennings Robert E; Bhargava Akhil
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Dooher Terrence E
Title: Wafer transfer system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4836733    Publication date : 1989-06-06
Referenced by: 148    Reference cited: 28   
    
3. 
Inventor: Hertel Richard J; MacIntosh Edward D
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Wafer transfer system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4449885    Publication date : 1984-05-22
Referenced by: 129    Reference cited: 5   
    
4. 
Inventor: Coad George L; Shaw R Howard; Hutchinson Martin A
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Sgarbossa Peter J
Title: Wafer transfer system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4311427    Publication date : 1982-01-19
Referenced by: 124    Reference cited: 4   
    
5. 
Inventor: Layman Frederick P; Huntley David A; Dick Paul H; Coad George L; Kuhlman Michael J; Vecta Roger M; Hobson Phillip M
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Warsh Kenneth L
Title: Wafer processing system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4705951    Publication date : 1987-11-10
Referenced by: 119    Reference cited: 11   
    
6. 
Inventor: Harra David J
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Reitz Norman E
Title: Apparatus for thermal treatment of semiconductor wafers by gas conduction incorporating peripheral gas inlet
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4512391    Publication date : 1985-04-23
Referenced by: 110    Reference cited: 15   
    
7. 
Inventor: Holden Scott C
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Apparatus for gas-assisted, solid-to-solid thermal transfer with a semiconductor wafer
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4457359    Publication date : 1984-07-03
Referenced by: 109    Reference cited: 3   
    
8. 
Inventor: Hutchinson Martin A
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Dooher Terrence E
Title: Sputter module for modular wafer processing machine
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4851101    Publication date : 1989-07-25
Referenced by: 101    Reference cited: 6   
    
9. 
Inventor: Codrington Robert S
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Berkowitz Edward H
Title: Catheter for use with NMR imaging systems
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4572198    Publication date : 1986-02-25
Referenced by: 99    Reference cited: 5   
    
10. 
Inventor: Stone Stanley A
Assignee: Varian Associates, Inc/Scientific Systems, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Schnapf David
Title: Autosampler
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4713974    Publication date : 1987-12-22
Referenced by: 94    Reference cited: 12   
    
11. 
Inventor: Hutchinson Martin A
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Dooher Terrence E
Title: Gate valve for wafer processing system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4715764    Publication date : 1987-12-29
Referenced by: 82    Reference cited: 10   
    
12. 
Inventor: Ackley James W
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Warsh Kenneth L
Title: Load lock pumping mechanism
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4534314    Publication date : 1985-08-13
Referenced by: 82    Reference cited: 10   
    
13. 
Inventor: Holden Scott C
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Method for gas-assisted, solid-to-solid thermal transfer with a semiconductor wafer
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4508161    Publication date : 1985-04-02
Referenced by: 82    Reference cited: 6   
    
14. 
Inventor: Graves, Jr Walter E; Boys Donald; Turner Frederick T
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Sgarbossa Peter J
Title: Sputter-coating system, and vaccuum valve, transport, and sputter source array arrangements therefor
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4313815    Publication date : 1982-02-02
Referenced by: 82    Reference cited: 7   
    
15. 
Inventor: Van Mastrigt Max
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Warsh Kenneth L
Title: Chemical vapor deposition apparatus
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4709655    Publication date : 1987-12-01
Referenced by: 81    Reference cited: 47   
    
16. 
Inventor: Messer Mark G; Stark Lawrence R
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Warsh Kenneth L; Dooher Terrence E
Title: Sputter module for modular wafer processing system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4670126    Publication date : 1987-06-02
Referenced by: 81    Reference cited: 6   
    
17. 
Inventor: Lamont, Jr Lawrence T
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Sgarbossa Peter J
Title: Method of thermal treatment of a wafer in an evacuated environment
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4680061    Publication date : 1987-07-14
Referenced by: 79    Reference cited: 21   
    
18. 
Inventor: Mintz Donald M
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Warsh Kenneth L
Title: Apparatus and method for manufacturing planarized aluminum films
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4661228    Publication date : 1987-04-28
Referenced by: 76    Reference cited: 8   
    
19. 
Inventor: Faretra Ronald A
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Reitz Norman E
Title: Apparatus for mechanically clamping semiconductor wafer against pliable thermally conductive surface
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4282924    Publication date : 1981-08-11
Referenced by: 76    Reference cited: 4   
    
20. 
Inventor: Mintz Donald M
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Warsh Kenneth L; Fisher Gerald M
Title: Apparatus for manufacturing planarized aluminum films
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4865712    Publication date : 1989-09-12
Referenced by: 70    Reference cited: 12   
    
21. 
Inventor: Brors Daniel L; Lane Larry R; Goldsborough Mark W; Samsel Jason M; van Mastrigt Max; Foster Robert
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Warsh Kenneth L
Title: Rapid thermal CVD apparatus
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4796562    Publication date : 1989-01-10
Referenced by: 70    Reference cited: 44   
    
22. 
Inventor: Boys Donald R; Graves Walter E
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Herbert Leon F
Title: Disk or wafer handling and coating system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4500407    Publication date : 1985-02-19
Referenced by: 70    Reference cited: 11   
    
23. 
Inventor: Downey Daniel F; Lecouras George T
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Reitz Norman E
Title: End point detection method for physical etching process
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4358338    Publication date : 1982-11-09
Referenced by: 70    Reference cited: 1   
    
24. 
Inventor: Hertel Richard J
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan W R; Herbert L F
Title: Wafer transfer system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4634331    Publication date : 1987-01-06
Referenced by: 64    Reference cited: 12   
    
25. 
Inventor: Hobson Phillip M; Dick Paul H
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Warsh Kenneth L
Title: Wafer processing chuck using slanted clamping pins
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4724621    Publication date : 1988-02-16
Referenced by: 63    Reference cited: 5   
    
26. 
Inventor: Seppi Edward J
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Radlo Edward J
Title: Removal of spectral artifacts and utilization of spectral effects in computerized tomography
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4149081    Publication date : 1979-04-10
Referenced by: 63    Reference cited: 1   
    
27. 
Inventor: Petric Paul F
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Reitz Norman E; McClellan William R
Title: Charged particle beam lithography machine incorporating localized vacuum envelope
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4607167    Publication date : 1986-08-19
Referenced by: 60    Reference cited: 10   
    
28. 
Inventor: Nunan Craig S
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Sgarbossa Peter J; Warsh Kenneth L
Title: Multileaf collimator and compensator for radiotherapy machines
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4868843    Publication date : 1989-09-19
Referenced by: 59    Reference cited: 13   
    
29. 
Inventor: Ernst Richard R
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Berkowitz E H
Title: Gyromagnetic resonance fourier transform zeugmatography
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4070611    Publication date : 1978-01-24
Referenced by: 58    Reference cited: 2   
    
30. 
Inventor: Yang Frank J
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Nishimura Keiichi; Reitz Norman E
Title: Narrow bore micro-particulate column packing process and product
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4483773    Publication date : 1984-11-20
Referenced by: 57    Reference cited: 2   
    
31. 
Inventor: Abu-Shumays Ahmad
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Morrissey John J; Fisher Gerald M
Title: Thermostatable flow cell for fluorescence measurements
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4180739    Publication date : 1979-12-25
Referenced by: 55    Reference cited: 4   
    
32. 
Inventor: Freeman Kenneth F; Garrett Charles B; Harra David J; Lei Lawrence C
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Sgarbossa Peter J
Title: Planar magnetron sputtering device with combined circumferential and radial movement of magnetic fields
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4714536    Publication date : 1987-12-22
Referenced by: 54    Reference cited: 2   
    
33. 
Inventor: Rainey Robert M
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Herbert Leon F; Berkowitz Edward H
Title: Target profile for sputtering apparatus
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4100055    Publication date : 1978-07-11
Referenced by: 54    Reference cited: 2   
    
34. 
Inventor: Decker David Richard; Omori Masahiro
Assignee: Varian Associates
Attorney: Cole Stanley Z; Fisher Gerald M
Title: Through-substrate source contact for microwave FET
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 3986196    Publication date : 1976-10-12
Referenced by: 54    Reference cited: 1   
    
35. 
Inventor: Enge Harald A
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Reitz Norman E
Title: Focusing apparatus for uniform application of charged particle beam
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4276477    Publication date : 1981-06-30
Referenced by: 52    Reference cited: 4   
    
36. 
Inventor: Lamont, Jr Lawrence T
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Sgarbossa Peter J
Title: Apparatus for thermal treatment of a wafer in an evacuated environment
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4909314    Publication date : 1990-03-20
Referenced by: 51    Reference cited: 31   
    
37. 
Inventor: Nunan Craig S
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Warsh Kenneth L
Title: X-ray and electron radiotherapy clinical treatment machine
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4726046    Publication date : 1988-02-16
Referenced by: 51    Reference cited: 12   
    
38. 
Inventor: Boys Donald R; Smith Robert M
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Herbert Leon F
Title: Apparatus for and method of controlling sputter coating
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4500408    Publication date : 1985-02-19
Referenced by: 50    Reference cited: 28   
    
39. 
Inventor: Davidson Christopher D
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Lowe Allan M
Title: Regulated DC to DC converter
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4559590    Publication date : 1985-12-17
Referenced by: 49    Reference cited: 11   
    
40. 
Inventor: Pavkovich John M
Assignee: Varian Associates
Attorney: Cole Stanley Z; Herbert Leon F
Title: Computer assisted radiation therapy machine
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 3783251    Publication date : 1974-01-01
Referenced by: 49    Reference cited: 4   
    
41. 
Inventor: Abbott Seth R
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Clarke Pauline A
Title: Mixed phase chromatographic compositions
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4298500    Publication date : 1981-11-03
Referenced by: 48    Reference cited: 8   
    
42. 
Inventor: Bustin Raphael
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Reitz Norman E
Title: Zero reference and offset compensation circuit
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4229703    Publication date : 1980-10-21
Referenced by: 48    Reference cited: 6   
    
43. 
Inventor: Seppi Edward J; Harell George S; Morehouse Charles C
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Herbert Leon F
Title: Method and system for cardiac computed tomography
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4182311    Publication date : 1980-01-08
Referenced by: 48    Reference cited: 9   
    
44. 
Inventor: Antypas George A
Assignee: Varian Associates
Attorney: Cole Stanley Z; Pressman David R; Stoddard Robert K
Title: Process for making III-V devices
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 3959045    Publication date : 1976-05-25
Referenced by: 48    Reference cited: 4   
    
45. 
Inventor: Lamont, Jr Lawrence T
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Sgarbossa Peter J
Title: Method of thermal treatment of a wafer in an evacuated environment
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4743570    Publication date : 1988-05-10
Referenced by: 47    Reference cited: 25   
    
46. 
Inventor: Turner Norman L
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4567938    Publication date : 1986-02-04
Referenced by: 47    Reference cited: 10   
    
47. 
Inventor: Pedersen Bjorn O; Jost Jonathan A
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Apparatus for controlling thermal transfer in a cyclic vacuum processing system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4527620    Publication date : 1985-07-09
Referenced by: 46    Reference cited: 7   
    
48. 
Inventor: Beaver William L
Assignee: Varian Associates
Attorney: Cole Stanley Z; Fisher Gerald M; Morrissey John J
Title: Signal processor for ultrasonic imaging
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4005382    Publication date : 1977-01-25
Referenced by: 46    Reference cited: 1   
    
49. 
Inventor: Berrian Donald W; Kaim Robert E; Vanderpot John W
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z
Title: Method and apparatus for high efficiency scanning in an ion implanter
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4980562    Publication date : 1990-12-25
Referenced by: 44    Reference cited: 25   
    
50. 
Inventor: Nunan Craig S
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Warsh Kenneth L
Title: Mutileaf collimator for radiotherapy machines
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4868844    Publication date : 1989-09-19
Referenced by: 44    Reference cited: 21   
    
51. 
Inventor: Turner Norman L
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Berkowitz Edward H
Title: Bean scanning and method of use for ion implantation
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4283631    Publication date : 1981-08-11
Referenced by: 43    Reference cited: 5   
    
52. 
Inventor: Nelson Norvell J
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Nelson Richard B; Sgarbossa Peter J
Title: Silicon nitride film and method of deposition
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4158717    Publication date : 1979-06-19
Referenced by: 43    Reference cited: 2   
    
53. 
Inventor: Anderson Weston A
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Morrissey John J; Sgarbossa Peter J
Title: Reconstruction system and method for ultrasonic imaging
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4074564    Publication date : 1978-02-21
Referenced by: 43    Reference cited: 9   
    
54. 
Inventor: Antypas George A
Assignee: Varian Associates
Attorney: Cole Stanley Z; Fisher Gerald M; Stoddard Robert K
Title: Epitaxial indium-gallium-arsenide phosphide layer on lattice-matched indium-phosphide substrate and devices
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 3982261    Publication date : 1976-09-21
Referenced by: 43    Reference cited: 10   
    
55. 
Inventor: Holden Scott C
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Methods and apparatus for gas-assisted thermal transfer with a semiconductor wafer
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4542298    Publication date : 1985-09-17
Referenced by: 42    Reference cited: 4   
    
56. 
Inventor: Hlavka Lloyd F
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Berkowitz Edward H
Title: RF pick-up coil circuit for a wide tuning range nuclear magnetic resonance probe
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4095168    Publication date : 1978-06-13
Referenced by: 42    Reference cited: 3   
    
57. 
Inventor: Achener Pierre Y; Boehme Detlef R; Judah Kenneth C; Munk Miner N
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Morrissey John J; Fisher Gerald M
Title: High pressure liquid chromatography system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4045343    Publication date : 1977-08-30
Referenced by: 42    Reference cited: 4   
    
58. 
Inventor: Bell Ronald L
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Nelson Richard B; Stoddard Robert K
Title: Solar energy converter with waste heat engine
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4002031    Publication date : 1977-01-11
Referenced by: 42    Reference cited: 5   
    
59. 
Inventor: Chow Robert; Downey Steven D
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Warsh Kenneth L
Title: Semiconductor etching apparatus with magnetic array and vertical shield
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4632719    Publication date : 1986-12-30
Referenced by: 41    Reference cited: 17   
    
60. 
Inventor: James Lawrence W
Assignee: Varian Associates
Attorney: Cole Stanley Z; Stoddard Robert K; Nelson Richard B
Title: Solar cells employing stacked opposite conductivity layers
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4017332    Publication date : 1977-04-12
Referenced by: 41    Reference cited: 5   
    
61. 
Inventor: Hughes John L; Lawson Eric C
Assignee: Intevac, Inc
Attorney: Cole Stanley Z
Title: Substrate handling and processing system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 5215420    Publication date : 1993-06-01
Referenced by: 40    Reference cited: 12   
    
62. 
Inventor: Mears Eric L; Jennings Robert E
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Dooher Terrence E
Title: Horizontal laminar air flow work station
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4927438    Publication date : 1990-05-22
Referenced by: 40    Reference cited: 21   
    
63. 
Inventor: Hutchinson Martin A; Shaw R Howard; Coad George
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Warsh Kenneth L
Title: Transfer plate rotation system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4548699    Publication date : 1985-10-22
Referenced by: 40    Reference cited: 4   
    
64. 
Inventor: Mishin Andrey; Schonberg Russell G
Assignee: Schonberg Research Corporation
Attorney: Cole Stanley Z; McClellan William
Title: Hollow-beam microwave linear accelerator
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 5811943    Publication date : 1998-09-22
Referenced by: 39    Reference cited: 5   
    
65. 
Inventor: Turner Norman L
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Method and apparatus for controlling thermal transfer in a cyclic vacuum processing system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4535834    Publication date : 1985-08-20
Referenced by: 37    Reference cited: 8   
    
66. 
Inventor: Boys Donald R; Graves Walter E
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Herbert Leon F
Title: Magnetron sputter coating source for both magnetic and non magnetic target materials
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4500409    Publication date : 1985-02-19
Referenced by: 37    Reference cited: 21   
    
67. 
Inventor: Yang Frank J
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Reitz Norman E
Title: Method and apparatus for on-column detection in liquid chromatography
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4375163    Publication date : 1983-03-01
Referenced by: 37    Reference cited: 2   
    
68. 
Inventor: Freytsis Avrum; Hertel Richard J; Mears Eric L
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Dooher Terrence E
Title: Disk scanning apparatus for batch ion implanters
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4899059    Publication date : 1990-02-06
Referenced by: 36    Reference cited: 16   
    
69. 
Inventor: Mears Eric L
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Dooher Terrence E
Title: Methods and apparatus for thermal transfer with a semiconductor wafer in vacuum
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4832781    Publication date : 1989-05-23
Referenced by: 36    Reference cited: 11   
    
70. 
Inventor: Klasen Rene; Schar Hugo; Vogt Heinz
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Novack Sheri M
Title: Radiation therapy unit
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4987309    Publication date : 1991-01-22
Referenced by: 35    Reference cited: 16   
    
71. 
Inventor: Mintz Donald M
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z
Title: Apparatus for and the method of controlling magnetron sputter device having separate confining magnetic fields to separate targets subject to separate discharges
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4595482    Publication date : 1986-06-17
Referenced by: 35    Reference cited: 12   
    
72. 
Inventor: Lamattina John R; Petric Paul F
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Envelope apparatus for localized vacuum processing
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4584479    Publication date : 1986-04-22
Referenced by: 35    Reference cited: 10   
    
73. 
Inventor: Siddall Graham J
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Deformable chuck driven by piezoelectric means
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4506184    Publication date : 1985-03-19
Referenced by: 35    Reference cited: 2   
    
74. 
Inventor: Berrian Donald W; Ward Billy W
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Pattern data handling system for an electron beam exposure system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4433384    Publication date : 1984-02-21
Referenced by: 35    Reference cited: 5   
    
75. 
Inventor: Pavkovich John M; Nunan Craig S
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Herbert Leon F; Radlo Edward J
Title: Tomographic apparatus and method for reconstructing planar slices from non-absorbed and non-scattered radiation
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4149247    Publication date : 1979-04-10
Referenced by: 35    Reference cited: 5   
    
76. 
Inventor: Hughes John L; Lawson Eric C
Assignee: Intevac, Inc
Attorney: Cole Stanley Z
Title: Substrate handling and processing system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 5425611    Publication date : 1995-06-20
Referenced by: 33    Reference cited: 4   
    
77. 
Inventor: Felch Susan B; Powell Ronald A
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Warsh Kenneth L; Fisher Gerald M
Title: Method of mapping ion implant dose uniformity
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4807994    Publication date : 1989-02-28
Referenced by: 33    Reference cited: 1   
    
78. 
Inventor: Layman Frederick P; Hobson Phillip M; Dick Paul H
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Warsh Kenneth L
Title: Valve incorporating wafer handling arm
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4764076    Publication date : 1988-08-16
Referenced by: 33    Reference cited: 10   
    
79. 
Inventor: Turner Frederick T; Hutchinson Martin A; Shaw R Howard; Lamont, Jr Lawrence T
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Dooher Terrence E
Title: Wafer coating system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4756815    Publication date : 1988-07-12
Referenced by: 33    Reference cited: 30   
    
80. 
Inventor: Giebeler, Jr Robert H
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Yakes John; Sgarbossa Peter J
Title: Ultrasound hyperthermia applicator with variable coherence by multi-spiral focusing
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4622972    Publication date : 1986-11-18
Referenced by: 33    Reference cited: 6   
    
81. 
Inventor: Robertson David A; Turner Norman L
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Beam scanning method and apparatus for ion implantation
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4421988    Publication date : 1983-12-20
Referenced by: 33    Reference cited: 3   
    
82. 
Inventor: Anderson Weston A
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Morrissey John J; Sgarbossa Peter J
Title: Lens system for acoustical imaging
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4183249    Publication date : 1980-01-15
Referenced by: 33    Reference cited: 14   
    
83. 
Inventor: Turner Frederick T
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Berkowitz Edward H
Title: Deposition rate regulation by computer control of sputtering systems
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4166783    Publication date : 1979-09-04
Referenced by: 33    Reference cited: 4   
    
84. 
Inventor: Lee Arnold S J
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Herbert Leon F
Title: Fluid containment structure for transducer system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4072056    Publication date : 1978-02-07
Referenced by: 33    Reference cited: 4   
    
85. 
Inventor: Hughes John L; Shula Thomas E; Rodriguez Carlos E
Assignee: Varian Associates, Inc
Attorney: Sgarbossa Peter J; Cole Stanley Z; Fisher Gerald M
Title: Dual track handling and processing system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4981408    Publication date : 1991-01-01
Referenced by: 32    Reference cited: 12   
    
86. 
Inventor: Schlabach Timothy D; Regnier Fred E
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Schnapf David
Title: Immobilized antigen-antibody displacement process
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4895809    Publication date : 1990-01-23
Referenced by: 32    Reference cited: 6   
    
87. 
Inventor: Good Thomas J
Assignee: Analytichem International, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Schnapf David
Title: Automatic sample injector and disposable sample cassette
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4711764    Publication date : 1987-12-08
Referenced by: 32    Reference cited: 1   
    
88. 
Inventor: Graves, Jr Walter E
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Herbert Leon F
Title: Substrate and substrate holder
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4558388    Publication date : 1985-12-10
Referenced by: 32    Reference cited: 8   
    
89. 
Inventor: Zens Albert P
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Berkowitz E H
Title: NMR Probe coil system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4398149    Publication date : 1983-08-09
Referenced by: 32    Reference cited: 2   
    
90. 
Inventor: Pierce Danny A; Heisler Joseph A; Self Roger D
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Herbert Leon F; Jepsen Robert L
Title: Target assemblies of special materials for use in sputter coating apparatus
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4385979    Publication date : 1983-05-31
Referenced by: 32    Reference cited: 8   
    
91. 
Inventor: Symons Robert Spencer
Assignee: Varian Associates
Attorney: Cole Stanley Z; Pressman D R; Aire H E
Title: Electron beam electrical power transmission system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 3886399    Publication date : 1975-05-27
Referenced by: 32    Reference cited: 8   
    
92. 
Inventor: Anderson Robert L; Helmer John C
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Novack Sheri M
Title: Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4995958    Publication date : 1991-02-26
Referenced by: 31    Reference cited: 5   
    
93. 
Inventor: Gaczi Peter J
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Warsh Kenneth L
Title: Low pressure chemical vapor deposition of metal silicide
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4766006    Publication date : 1988-08-23
Referenced by: 31    Reference cited: 7   
    
94. 
Inventor: Corey, Jr Philip D; Lundquist Paul M; Brick Robert V
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Dooher Terrence E
Title: Dose measurement and uniformity monitoring system for ion implantation
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4751393    Publication date : 1988-06-14
Referenced by: 31    Reference cited: 6   
    
95. 
Inventor: Munk Miner N
Assignee: Varian Associates
Attorney: Cole Stanley Z; Fisher Gerald M; Morrissey John J
Title: Liquid chromatography pumping system with compensation means for liquid compressibility
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4032445    Publication date : 1977-06-28
Referenced by: 31    Reference cited: 6   
    
96. 
Inventor: Baum Aaron Wolf; Costello Kenneth A
Assignee: Intevac, Inc; Board of Trustees of the Leland Stanford Jr University
Attorney: Cole Stanley Z; McClellan William R
Title: Electron sources utilizing negative electron affinity photocathodes with ultra-small emission areas
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 5684360    Publication date : 1997-11-04
Referenced by: 30    Reference cited: 6   
    
97. 
Inventor: Mears Eric L; Hertel Richard J; Brick Robert V; Holt, Jr Carl J
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Sgarbossa Peter J
Title: Apparatus for retaining wafers
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 5040484    Publication date : 1991-08-20
Referenced by: 30    Reference cited: 39   
    
98. 
Inventor: Robertson David A; Turner Norman L
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Apparatus for enhanced neutralization of positively charged ion beam
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4463255    Publication date : 1984-07-31
Referenced by: 30    Reference cited: 11   
    
99. 
Inventor: Shaw R Howard
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Sgarbossa Peter J
Title: Wafer support assembly
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4306731    Publication date : 1981-12-22
Referenced by: 30    Reference cited: 3   
    


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