Inventor: Stark Lawrence R; Turner Frederick

Assignee: Varian Associates, Inc

Attorney: Cole Stanley Z; Fisher Gerald M; Sgarbossa Peter J

Title: Modular wafer transport and processing system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4917556    Publication date : 1990-04-17
Referenced by: 223    Reference cited: 17   
    

Inventor: Hertel Richard J; MacIntosh Edward D
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Wafer transfer system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4449885    Publication date : 1984-05-22
Referenced by: 129    Reference cited: 5   
    

Inventor: Layman Frederick P; Huntley David A; Dick Paul H; Coad George L; Kuhlman Michael J; Vecta Roger M; Hobson Phillip M
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Fisher Gerald M; Warsh Kenneth L
Title: Wafer processing system
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4705951    Publication date : 1987-11-10
Referenced by: 119    Reference cited: 11   
    

Inventor: Holden Scott C
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; McClellan William R
Title: Apparatus for gas-assisted, solid-to-solid thermal transfer with a semiconductor wafer
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4457359    Publication date : 1984-07-03
Referenced by: 109    Reference cited: 3   
    

Inventor: Codrington Robert S
Assignee: Varian Associates, Inc
Attorney: Cole Stanley Z; Berkowitz Edward H
Title: Catheter for use with NMR imaging systems
Patent Office: United States of America Patent and Trademark Office. Granted Patents (USPTO)    Document Number: 4572198    Publication date : 1986-02-25
Referenced by: 99    Reference cited: 5